Formation and Structure of APTES Films on Si
A general consensus regarding the 3-Aminopropyltriethoxysilane (APTES) film formation on a silicon substrate is that silanization begins with the hydrolysis of ethoxy groups in APTES, a process catalyzed by water, leading to the formation of silanols. APTES silanols then condense with surface silanols forming a monolayer of APTES via a lateral siloxane network in which amino groups are oriented away from the underlying silicon surface. A host of experimental results, however, have suggested that this is an oversimplified description of the idealized reaction and that the actual process is far more complex and sensitive to reaction conditions.1-5 In this work, APTES films were produced in two different solutions, anhydrous toluene and phosphate buffered water, for varied deposition times. The effect of the reaction solution and deposition time on the structure of APTES films was investigated via Fourier transform infrared spectroscopy (FTIR) with a grazing–angle attenuated total reflection method and ellipsometry.
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