Effects of Curing Conditions on the Structure and Stability of APTES on Si
Introduction 3-aminopropyltriethoxysilane (APTES) is one of the most frequently used organosilane coupling agents for the introduction of chemically reactive amino groups on silicon substrates. Recently, our research group investigated the structure of APTES fi lms on silicon substrates deposited in toluene solutions for varied times.1,2 The results have shown that at least three different types of APTES exist in fi lms prepared for extended deposition times; APTES directly condensed on the silicon surface, APTES condensed with other APTES, and physisorbed and/or partially condensed APTES. In this work, we investigated the effect of curing conditions on the structure and stability of APTES fi lms exposed to aqueous solutions. APTES fi lms were produced in anhydrous toluene solutions, cured under different conditions, and fi nally sonicated in water. After each procedure, changes in the structure and stability of APTES fi lms were monitored using Fourier transform infrared spectroscopy (FTIR) with single-refl ectance attenuated total refl ection (ATR) mode and ellipsometry.
If PDF does not load, please refresh your browser or click here: