Vertical Wafer Accessory

The Vertical Wafer Accessory is an in-compartment tool for transmission analysis of wafers. It accomodates wafers up to 6 inches. The wafer support ring uses mounting clips to eliminar contact between the wafer and the metal surfaces during the analysis. Using two precision stepper motors for rotation and translation of the plate, the wafer support ring may be rotated through 360° and translated laterally through a distance of over 3 inches to produce an R-theta motion covering the entire surface of the wafer. This accessory is ideal for mapping surfaces for uniformity.

  • Transmission analysis of semiconductor wafers for Carbon, Oxygen and BPSG
  • Available wafer sizes are 6, 5, 4, 3 and 2 inch
  • Custom mounts available

Product InformationRequest A Quote

 
 
 

DOWNLOAD A CATALOG TODAY!

This newest PIKE catalog contains details on a wide range of spectrometer accessories, applications and theory.

Download>

NEWS

UPCOMING TRADE SHOWS


SciX

Booth 14

October 8 - 11

Reno, NV


Optifab

Booth 202

October 17-19

Rochester, NY

 

 


Tel: 608.274.2721
info@piketech.com

NEW CATALOG

Download >