Vertical Wafer Accessory

The Vertical Wafer Accessory is an in-compartment tool for transmission analysis of wafers. It accomodates wafers up to 6 inches. The wafer support ring uses mounting clips to eliminate contact between the wafer and the metal surfaces during the analysis. Using two precision stepper motors for rotation and translation of the plate, the wafer support ring may be rotated through 360° and translated laterally through a distance of over 3 inches to produce an R-theta motion covering the entire surface of the wafer. This accessory is ideal for mapping surfaces for uniformity.

  • Transmission analysis of semiconductor wafers for Carbon, Oxygen and BPSG
  • Available wafer sizes are 6, 5, 4, 3 and 2 inch
  • Custom mounts available

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