MappIR

The MappIR is a fully automated accessory for the mapping analysis of wafers. Sampling may be performed in specular reflection or transmission mode. This accessory fits inside the sample compartment of most full size FTIR instruments. It can accept wafers up to 8 inches (200 mm) in diameter. Contact PIKE for custom mounts. Precision motion may be programmed in R-theta or Cartesian coordinates using the PIKE AutoPro software. The optics of the accessory are purgeable, and fully purgeable enclosure for the sample is optional.

• Automated transmission and specular reflection mapping of wafers
• Up to 8 inch wafers
• Custom wafer mounts available